This volume from the “Micro and Nanoengineering” series (edited by the Publishing House of the Romanian Academy) includes the papers which have been presented at the 7h “MEMSWAVE” workshop, organized by University of Perugia, in the frame of the “AMICOM” Network of Excellence financed by the EC.

The papers are focused on emerging MEMS technologies for RF and millimeter wave circuits. MEMS technologies are now one the most exciting and promising solution to manufacture high performance millimeter wave circuits to be used in the emerging wireless communication systems.

This volume is addressed to all interested people from universities, research institutes or companies working in microwaves, millimeter waves, and MEMS. It will be distributed to the university libraries.


Roberto Sorrentino Professor at University of Perugia, Perugia, Italy is President of the European Microwave Association (EuMA). He is working on various subjects but mainly in the field of numerical methods and CAD techniques for passive microwave structures, the analysis and design of microwave and millimeter-wave circuits. He is the coordinator of the Network of Excellence "AMICOM"
Alexandru Müller senior research scientist at the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001), nominated between the ten finalists in the competition for the Descartes Prize 2002, coordinator of the Romanian team in the AMICOM FP6 Network of Excellence.
Dan Dascalu member of the Romanian Academy (of Sciences), is professor of Electronic Engineering at the “Politechnica” University, Bucharest, Romania, and General Manager of the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania.


Wireless communication at radio, microwave and millimetre wave frequencies is continuing to show explosive growth in consumer applications. Examples include wireless personal (hand-held) communication systems such as mobile phones, wireless local area networks (WLAN), satellite communications, automotive radar and millimetre wave, industrial, scientific and medical (ISM) applications. In addition to the ever higher data rates, future advanced communication systems will require increased functionality, and low weight, volume, power consumption and noise. Today it is mandatory to realize high frequency receivers featuring very low noise behaviour. However, this demand conflicts with the requirements to increase the operating frequency, to decrease the power consumption and to boost the number of users.The RF Chip has to work nicely anywhere anytime and has to be as cheap as possible. The task of the system designers is to identify the technology that will meet all the requirements:
A lot of effort has been put into RF-MEMS technologies during the past ten years. A broad range of components and subsystems have been demonstrated, with functions and performances that are significantly improved over conventional microwave and millimetre (mm)-wave technologies.

To realize the RF microsystem concept, research and collaboration in many different fields including; fabrication technology, material science, electromagnetism, micromechanics, thermal and electrical modelling, characterization, packaging and reliability. is required
The main scope of the MEMSWAVE workshop is to bring together scientists from different universities, research institutes, and industrial companies interested in the development of the RF-MEMS field and to create a forum for the knowledge exchange between the RF-MEMS players. The workshop is now technically sponsored by the European Microwave Association (EuMA)

The MEMSWAVE workshop was generated by the European project “Micromachined Circuites for Microwave and Millimeter Wave Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT-Bucharest. The project was nominated between the ten finalists (from 108 participants) to the Descartes Prize 2002.

The Editors


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