ELECTROSTATIC MEASUREMENT OF STRESS-INDUCED CURVATURE
V. LEUS, A. HIRSHBERG, T. LISEC, D. ELATA

Abstract. A novel method for measuring stress-induced curvature in cantilevered micro-beams is presented and demonstrated experimentally. The method is based on the electrostatic response of specially-designed test structures. Three different pull-in voltages are measured on a single test structure and multiplied by specific factors. When all three results are identical the beam is necessarily straight, and this measurement is independent of any material or geometrical parameters.