RF MEMS CHARACTERIZATION PLATFORM BASED ON MICROWAVE INSTRUMENTATION
D. GIRBAU, L. PRADELL, A. LÁZARO, N. OTEGI

Abstract. This paper presents a multidisciplinary characterization platform for RF MEMS measurement, based on microwave instrumentation. The platform has been designed to characterize mechanical parameters –dynamics: actuation and release times, resonance frequency and damping–, RF power handling, intermodulation distortion, and static parameters of both, MEMS capacitors and switches. In addition, new measurement concepts applied to RF MEMS low-frequency parameters characterization, such as measurement from their reflection coefficient phase variations and calibration are also proposed.