RF MEMS RELIABILITY FOR SPACE APPLICATIONS
S. Di NARDO, E. Di PAOLA, G. MANNOCCHI, U. DIMARCANTONIO, P. FARINELL, M. FEUDALE, R. MARCELLI, B. MARGESIN, P. MEZZANOTTE, F. VITULLI, L. VIETZORRECK

Summary
In this paper at first the reliability requirements to use RF-MEMS in space are detailed with reference to existing military (MIL) and ESA (ECSS) specifications. In order to asses the ability of RF-MEMS to meet those requirements, tests have been performed on packaged air-bridge type SPDTs switches. These devices have been developed by Alcatel Alenia Space Italia in the frame of ESA contract No. l4628/NL/CK in collaboration with the Perugia and Munich Universities, the Italian National Research Council (CNR) and ITC-IRST. The performed tests included: vibrations (sine and random), shock (with varying accelerations), thermal cycles and leak tests.