CAPACITANCE SIMULATION BETWEEN ROUGH SURFACES OF ELECTROSTATICALLY ACTUATED CANTILEVER BEAM STRUCTURES BY REVERSE ENGINEERING METHOD
D. PEYROU, P. PONS, R. PLANA

Abstract. This paper presents a reverse engineering method used to simulate the capacitance of an RF-MEMS Capacitive Switch. This numeric approach allows us to understand the roughness effect of the dielectric on the down-state capacitance. The agreement between the modelling and the analytical model is very good. And validates this novel numeric approach.