PIEZO-OPERATED MEMS DIELECTRIC PHASE SHIFTER
Y. POPLAVKO, I. GOLUBEVA, Y. PROKOPENKO

Abstract. Possible alternative of low loss and highly tunable MEMS phase shifter is discussed. Dielectric or metallic parts of device should have the piezo-dirigible air gap between them. Important is to provide a strong perturbation in the electromagnetic field in the region influenced by the mechanical control. Energy distribution within the device is controlled by piezoelectric actuator, and can be described as a change in the effective dielectric permittivity (ε_eff). Scaled prototype was realized experimentally.