Composite Right/Left-Handed Structures Fabricated on Gold Thin Films by
Using Ultra-Short Laser Pulses
M. ZAMFIRESCU, R. DABU, M. DUMITRU, G. SAJIN, F. CRACIUNOIU, A.
Abstract. The laser etching is proposed as a complementary tehnique to
the chemical photo-lithography, in order to fabricate micro-structures
with aplications in the GHz frequency range. Films of few-hundreds nm of
gold deposited on glass or silicon are precisely processed by tightly
focusing a femtosecond laser with 150 fs pulse duration, 775 nm
wavelength, and energy of tens of nJ. When the laser fluence is hold just
above the ablation threshold, the evaporated film leaves behind structures
with thin lateral size of about 1 µm. Using this technique, the
fabrication of micro-structures is demonstrated.
Keywords: laser etching, diffraction limit, microwave devices, metamaterials, transmission lines.