Dimensional Effects Observed for the Physical Properties of TiO₂ Sputtered Films
M. STAMATE, G. LAZĂR, I. LAZĂR

Abstract. In this paper we present dimensional effects observed for TiO₂ films deposited by a dc circular magnetron sputtering method. We have found that the dielectric properties have an important dependency of thickness for amorphous TiO₂ thin films. From the non-linear characteristics for TiO₂ films prepared in sandwich structures (aluminum-TiO₂-aluminum), on microscopic slide glass, we have found that the trap density is lower for films with larger thicknesses. We have calculated the carrier effective mass and the high of the barrier potential at an aluminum-TiO₂ interface and we have found that there is a significant dependence for carrier effective mass with thickness of the film.