GaAs MEMBRANE-SUPPORTED 60 GHz RECEIVER WITH YAGI-UDA ANTENNA
D. NECULOIU, G. KONSTANTINIDIS, T. VÄHÄ-HEIKKILÄ, A. MÜLLER, D. VASILACHE, A. STAVINIDRIS, L. BARY, M. DRAGOMAN, I.PETRINI, C. BUICULESCU, Z. HAZOUPULOS, N. KORNILIOS, P. PURSULA, R. PLANA, D. DASCALU

Abstract. This paper presents the design, fabrication and characterization of a GaAs membrane supported millimeter wave receiver operating in the 60 GHz frequency range. The design approach includes intensive electromagnetic simulation and modeling. The fabrication processes is based on GaAs micromachining and the Schottky diode is monolithically integrated with the Yagi-Uda antenna on the same 2.2 µm thin semi-insulating GaAs membrane.