RF-MEMS SWITCHES FOR W-BAND APPLICATIONS
A. STEHLE, V. ZIEGLER, B. SCHÖNLINNER, U. PRECHTEL, H. SEIDEL, U.
This paper presents RF-MEMS switches for W-Band applications with targeted
frequency range from 76-81 GHz. The devices are fabricated on a silicon
substrate in a very low complexity process using only one metallization.
The switch was simply scaled from the very successful Ka-Band version to
W-Band and shows an insertion loss of -0.75 dB and an isolation of -13 dB
in the targeted frequency range. Beside the measurement results this paper
gives some ideas for improving the non-optimized performance of the device