AND REALIZATION OF A MEMS-TUNED REFLECTARRAY ON LTCC SUBSTRATE
J. PERRUISSEAU-CARRIER, H. LEGAY, J. LENKKERI, J.-P. POLIZZI, E.
JUNG, A.K. SKRIVERVIK
This paper presents a reflectarray cell based on LTCC technology and
incorporating packaged MEMS devices for reconfigurability. The radiating
element is a patch antenna with slots accommodating the 5 MEMS switches.
We describe here the approach employed for the fabrication and design of
the element, which will be used for the realization of a small 4x4 MEMS-tuned