PLANAR SPIRAL INDUCTORS WITH MEMS TECHNOLOGY
E.U. TEMOCIN, H.I. ATASOY, K. TOPALLI, M. UNLU, I. ISTANBULLUOGLU, O. BAYRAKTAR, S. DEMIR, O.A. CIVI, S. KOC, T. AKIN

Abstract. This paper presents a parametric study on surface micro-machined square spiral radio frequency (RF) inductors. One port of the inductor is realized forming a suspended air bridge so that the spiral shape is not distorted. The structures are simulated using Ansoft HFSS 9.2 and analyzed in 1-20 GHz band Agilent 8720D Network Analyzer using short-open-load-through (SOLT) calibration method. Fabrication is performed on 500 µm thick Pyrex 7740 substrate with 1µm base Au metallization and 2 µm thick sputtered Au air bridge. Inductance values from 0.12 nH to 20.16 nH are measured with high self resonant frequencies.