MONOLITHICALLY INTEGRATED MEMS PHASED ARRAY
K. TOPALLI, O. AYDIN CIVI, S. DEMIR, S. KOC, T. AKIN

Abstract. This paper presents a novel monolithically integrated MEMS phased array. The structure, which is designed at 15 GHz, consists of four linearly placed microstrip patch antennas, 3-bit distributed RF MEMS phase shifters, and a corporate feed network. MEMS switches and metal-air-metal capacitors are employed as loading elements in the phase shifter. The system is fabricated with a surface micromachining process on a glass substrate developed at the Microelectronics Facilities of METU. The measurements results show that the phase shifter can provide required progressive phase shifts at the expense of 1.5 dB average insertion loss at 15 GHz for eight combinations.