MONOLITHICALLY INTEGRATED MEMS PHASED ARRAY
K. TOPALLI, O. AYDIN CIVI, S. DEMIR, S. KOC, T. AKIN
This paper presents a novel monolithically integrated MEMS phased array.
The structure, which is designed at 15 GHz, consists of four linearly
placed microstrip patch antennas, 3-bit distributed RF MEMS phase
shifters, and a corporate feed network. MEMS switches and metal-air-metal
capacitors are employed as loading elements in the phase shifter. The
system is fabricated with a surface micromachining process on a glass
substrate developed at the Microelectronics Facilities of METU. The
measurements results show that the phase shifter can provide required
progressive phase shifts at the expense of 1.5 dB average insertion loss
at 15 GHz for eight combinations.