TOWARDS A TUNABLE VHF FULLY INTEGRATED MEMS- MIXLER
A. URANGA, J. VERD, J.L LÓPEZ, J. TEVA, G. ABADAL, F. TORRES, J.
ESTEVE, F. PÉREZ-MURANO, N. BARNIOL
The design and test of a fully integrated CMOS–MEMS–MIXLER, using a
commercial technology (AMS 0.35 µm) is presented. The MEMS structure is
basically a clamped-clamped beam resonator implemented with the
polysilicon capacitance module of the selected technology, showing a
fundamental lateral resonance frequency of 22.5 MHz. Two different
approaches, based respectively on the non linearity of the voltage versus
the excitation force and on the amplitude modulation of the excitation
signal, have been proposed in order to operate the MEMS as a MIXLER.