SERIES AND SHUNT RF MEMS SWITCHES WITH DIELECTRIC MEMBRANE FOR WPAN AD HOC NETWORKS
A. BOE, M. FRYZIEL, N. DEPARIS, C. LOYEZ, L. LE GARREC, N. ROLLAND, P.-A. ROLLAND

Abstract. Smart antennas are useful in high data rate networks and can be addressed through a SP6T (Single Pole 6 Throw) based on MEMS switches on GaAs substrate. This RF MEMS switch exhibits an actuation voltage of 25 V. An isolation of 23 dB and an insertion loss lower than 0.6 dB have been measured at 60 GHz. With these switches, one can expect a SP6T with isolation better than 20 dB and losses smaller than 0.9 dB. To go further, some shunt switches can be added. A fully compatible shunt switch process has been developed and provides switches with isolation better than 15 dB and insertion loss lower than 0.3 dB.