NOVEL MICROSTRIP DISTRIBUTED RF MEMS PHASE SHIFTERS FOR PHASED ARRAY APPLICATIONS
V. JANARDHANA, S. PAMIDIGHANTAM, R.G. KULKARNI, J.S. ROY

Abstract. Novel design of Fabrication and simulated results for wide band Phase Shifters using surface micro machined cascaded microstrip is presented for Radar Phased array and communication Systems. The design configuration consists of CPW Input feed, Microstrip bridge, CPW output feed (CPWMS-CPW). The Microstrip Bridge in the form of transmission line provides variable impedance to the two end ports.
The upstate numerically simulated results using Electromagnetic software MWS –CST Germany and wafer level measured results are presented. The results are presented for two cascaded and three-cascaded CPW-MS-CPW configurations of phase shifters.

Phase Shifter Configuration

S11
(M)

S11
(S)
S21
(M)
S21
(S)
S21
(PM)
S21
(PS)
2-Cascaded 21.6 15.1 1.3 0.8 176 157
3-Cascaded 9.6 7.8 33.3 1.7 273 242

• 2–Cascaded: Two Cascaded CPW-MS-CPW Configuration results in dB at 15 GHz.
• 3–Cascaded: Three Cascaded CPW-MS-CPW Configuration results in dB at 15 GHz.
• (M) – Measured, (S) – Simulated, (PM) – Phase
Measured in degrees and (PS) – Phase Simulated in degrees. The down state wafer level measurements and simulated results are also presented.