REDUCTION OF STICKING EFFECT IN MICRO-SWITCH BY RESTORING FORCE
H. ACHKAR, D. PEYROU, F. PENNEC, P. PONS, R. PLANA, M. SARTOR
In this paper, we tried to find a solution for the sticking of the RF-Micro
switch by proposing a structure which ameliorates the restoring force
without changing the pull-in voltage. First we showed the need of
different stiffness of the structure between the state before actuation
and after it collapses. An analytical model is then derived to study the
efficiency of our solution.