AFM ANALYSIS OF DIELECTRIC CHARGING FOR MEMS CAPACITIVE SWITCHES RELIABILITY
M. LAMHAMDI, A. BELARNI, P. PONS, L. BOUDOU, J. GUASTAVINO, Y. SEGUI, M. DILHAN, R. PLANA

Abstract. In this paper, we present a simplified method to evaluate the dielectric charging using only simple dielectric layers onto full wafer. This method is based on charge imaging by atomic force microscopy (AFM). The experimental images obtained can then be compared versus time in order to evaluate the dielectric ability to evacuate the charges. This method is also close to the real configuration of the switch in the down position with local contacts. This study is coupled to the MIM capacitor measurements, in order to evaluate the total amount and surface distribution of trapped charges.