How to Build a Reliable RF MEMS Switch

Gabriel M. REBEIZ

University of California, San Diego, ECE Department, La Jolla, CA 92093, USA
Phone: +1-858-534-8001

Abstract. This paper discusses the successes and pitfalls in building RF MEMS switches. It is the author’s opinion, after 11 years in the field of RF MEMS, that factors which are not related to microwave engineering have the largest impact on RF MEMS viability. The field may therefore be shifting from one which was traditionally based on microwave engineering to one where chemical, mechanical and manufacturing engineering play a vital role in the success of this endeavor. Also, a realistic view of the role of RF MEMS should be taken, and one should only develop components which have a large chance of grabbing a decent market share. As will be shown in this paper, they are few RF MEMS components or sub-systems which are viable in today’s competing technologies.