An Efficient Modeling Method for Simulating Time-Response of RF-MEMS Switches

V. LEUS, D. ELATA

Technion – Israel Institute of Technology, Haifa 32000, Israel, Phone: +9724292617

Abstract. A novel efficient method for simulating the undamped time-response of RF-MEMS switches is presented. Computation of only four static states enables to reconstruct the entire dynamic response for any applied voltage, avoiding explicit time-integration of the momentum equations. Furthermore, the dynamic pull-in voltage of the switch can be easily extracted with no additional computational effort.