Nano-Electro-Mechanical-Systems: from Ideas to Reality Check

Adrian M. IONESCU

Nanolab, École Polytéchnique Fédérale Lausanne, Switzerland

Abstract. This paper is addressing some of the opportunities and challenges related to the unique features of Nano-Electro-Mechanical-Systems (NEMS) and their potential for future applications. NEMS have generated a large spectrum of original new device ideas motivated by their intrinsic characteristics, with potential applications in ultimate sensing, analog and radio frequency. However, the path from the simple proof of concept of new NEMS device concepts to the full achievement of the specifications needed for real-life applications faces difficult obstacles that need substantial supplementary efforts and smart engineering for success. Beyond the fabrication, modeling, simulation and design challenges of NEMS, integrated interfaces for local signal processing are critically needed in many applications. The paper is illustrated with some concrete examples of hybrid NEM-semiconductor devices that can hold promise for future low power applications of NEMS.