Development of a Lamb-Wave Sensor for Biological Applications

A.K. PANTAZIS^1,2,3,*, E. GIZELI^2,3, A. ADIKIMENAKIS^1,4, A. GEORGAKILAS^1,4, A. STAVRINIDIS¹, G. KONSTANTINIDIS<sup>1

1</sup>Microelectronics Research Group, IESL, FORTH, P.O. Box 1527, Vassilika Vouton, Heraklion, Greece
*E-mail: [email protected]; Phone: +302810394105
²Biosensors lab., IMBB, FORTH, P.O. Box 1538 Vassilika Vouton, Heraklion, Greece
³Biology Department, University of Crete, Vassilika Vouton, Heraklion, Greece
⁴Physics Department, University of Crete, P.O. Box 2208, Vassilika Vouton, Heraklion, Greece

Abstract. A variety of acoustic devices are used for detecting different biotargets in real-time. Sensitivity is one of the specifications that a sensor should have and it plays a crucial role in the efficiency of detection. Lamb-wave sensors are devices with great sensitivity due to the fact that they are fabricated on a membrane. Most of today’s Lambtype sensors use materials that are being deposited by sputtering like AlN and ZnO. In this paper, we describe the development of a Lamb-Wave sensor, based on epitaxial GaN material, which will be used for biological applications.