ABOUT THE BOOK
This volume from the “Micro and Nanoengineering” series (edited by the
Publishing House of the Romanian Academy) includes the extended
version of most interesting papers which have been presented at the
5th “MEMSWAVE” workshop, organized by Uppsala University, in the frame
of the “AMICOM” Network of Excellence financed by the EC.
The papers are focused on advanced MEMS for RF and millimeter wave
communications. MEMS technologies are now one the most exciting and
promising solution to manufacture high performance millimeter wave
circuits to be used in the emerging wireless communication systems.
This volume is addressed to all interested people from universities,
research institutes or companies working in microwaves, millimeter
waves, and MEMS. It will be distributed to the university libraries.
ABOUT THE EDITORS
Alexandru Müller senior research scientist at the National Institute
for Research and Development in Microtechnologies (IMT Bucharest),
Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001),
nominated between the ten finalists in the competition for the
Descartes Prize 2002, coordinator of the Romanian team in the AMICOM
FP6 Network of Excellence.
Anders Rydberg professor in Applied Microwave and Millimeterwave
Technology at Uppsala University, Department of Engineering Sciences,
Uppsala, Sweden. He also acts as R&D team leader at SensysTraffic AB,
Sweden. Uppsala University is partner in NoE "AMICOM".
Robert Plana professor at the “Paul Sabatier University” of Toulouse,
France and at the “Institute Universitaire de France”, Paris, senior
researcher at LAAS CNRS, Toulouse. He is the coordinator of the FP6
Network of Excellence in RF MEMS “AMICOM” (Priority 2, IST). Prof R
Plana is now also Director at Information and Communication Science
and Technology Department, CNRS.
Wireless communication at radio, microwave and millimeter wave
frequencies is continuing to show explosive growth in consumer
applications. Examples include wireless personal (hand-held)
communication systems such as mobile phones, wireless local area
networks (WLAN), satellite communications, automotive radar and
millimeter wave, industrial, scientific and medical (ISM)
applications. In addition to the ever higher data rates, future
advanced communication systems will require increased functionality,
and low weight, volume, power consumption and noise. However, the
limit of this process is now being approached and future developments
are restricted by the capabilities of conventional components. A new
class of device fabricated using semiconductor micromachining
fabrication techniques promise to overcome these limitations and also
add new functionality. These new components based on
MicroElectroMechanical Systems (MEMS) are called RF-MEMS devices. In
many cases improved performance has already been demonstrated in the
laboratory and to take advantage of their improved capabilities
intense research effort is now required to ease their introduction
into industrial product lines. Deeper understanding of these new
RF-MEMS devices and experience with their implementation into systems
will allow the targeting of highly integrated system concepts such as
reconfigurable WLAN, pico radio concept, high reliability and high
The main scope of the MEMSWAVE workshop is to constitute a forum for
the exchange of information and achievements within the RF MEMS
The MEMSWAVE workshop was generated by the European project
“Micromachined Circuits for Microwave and Millimeter Wave
Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT Bucharest.
The project was between the ten finalists (from 108 participants) to
the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized at Sinaia
(Romania) in 1999 and 2001. Now the MEMSWAVE workshops became an
itinerant European event. The third edition (2002) of this workshop
was organized in Heraklion (Greece) and the forth edition (2003) took
place in Toulouse (France). Starting from 2002 a special volume in the
series Micro and Nanoengineering of the Romanian Academy Publishing
House was dedicated every year to the MEMSWAVE Workshop.
Most of the European teams involved in the challenging topics of “MEMS
for RF and millimeter wave communications” are partners in the FP 6
network of excellence AMICOM coordinated by LAAS CNRS Toulouse.
Starting from 2004 the MEMSWAVE workshop became a deliverable and one
of the most important knowledge dissemination instruments of the
The present volume contains the extended version of the most
interesting papers presented at the fifth edition of the MEMSWAVE
workshop organized by Uppsala University in July 2004.