This volume from the “Micro and Nanoengineering” series (edited by the Publishing House of the Romanian Academy) includes the extended version of most interesting papers which have been presented at the 5th “MEMSWAVE” workshop, organized by Uppsala University, in the frame of the “AMICOM” Network of Excellence financed by the EC.

The papers are focused on advanced MEMS for RF and millimeter wave communications. MEMS technologies are now one the most exciting and promising solution to manufacture high performance millimeter wave circuits to be used in the emerging wireless communication systems.

This volume is addressed to all interested people from universities, research institutes or companies working in microwaves, millimeter waves, and MEMS. It will be distributed to the university libraries.


Alexandru Müller senior research scientist at the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001), nominated between the ten finalists in the competition for the Descartes Prize 2002, coordinator of the Romanian team in the AMICOM FP6 Network of Excellence.
Anders Rydberg professor in Applied Microwave and Millimeterwave Technology at Uppsala University, Department of Engineering Sciences, Uppsala, Sweden. He also acts as R&D team leader at SensysTraffic AB, Sweden. Uppsala University is partner in NoE "AMICOM".
Robert Plana professor at the “Paul Sabatier University” of Toulouse, France and at the “Institute Universitaire de France”, Paris, senior researcher at LAAS CNRS, Toulouse. He is the coordinator of the FP6 Network of Excellence in RF MEMS “AMICOM” (Priority 2, IST). Prof R Plana is now also Director at Information and Communication Science and Technology Department, CNRS.


Wireless communication at radio, microwave and millimeter wave frequencies is continuing to show explosive growth in consumer applications. Examples include wireless personal (hand-held) communication systems such as mobile phones, wireless local area networks (WLAN), satellite communications, automotive radar and millimeter wave, industrial, scientific and medical (ISM) applications. In addition to the ever higher data rates, future advanced communication systems will require increased functionality, and low weight, volume, power consumption and noise. However, the limit of this process is now being approached and future developments are restricted by the capabilities of conventional components. A new class of device fabricated using semiconductor micromachining fabrication techniques promise to overcome these limitations and also add new functionality. These new components based on MicroElectroMechanical Systems (MEMS) are called RF-MEMS devices. In many cases improved performance has already been demonstrated in the laboratory and to take advantage of their improved capabilities intense research effort is now required to ease their introduction into industrial product lines. Deeper understanding of these new RF-MEMS devices and experience with their implementation into systems will allow the targeting of highly integrated system concepts such as reconfigurable WLAN, pico radio concept, high reliability and high security WLAN.
The main scope of the MEMSWAVE workshop is to constitute a forum for the exchange of information and achievements within the RF MEMS players.
The MEMSWAVE workshop was generated by the European project “Micromachined Circuits for Microwave and Millimeter Wave Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT Bucharest. The project was between the ten finalists (from 108 participants) to the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized at Sinaia (Romania) in 1999 and 2001. Now the MEMSWAVE workshops became an itinerant European event. The third edition (2002) of this workshop was organized in Heraklion (Greece) and the forth edition (2003) took place in Toulouse (France). Starting from 2002 a special volume in the series Micro and Nanoengineering of the Romanian Academy Publishing House was dedicated every year to the MEMSWAVE Workshop.
Most of the European teams involved in the challenging topics of “MEMS for RF and millimeter wave communications” are partners in the FP 6 network of excellence AMICOM coordinated by LAAS CNRS Toulouse. Starting from 2004 the MEMSWAVE workshop became a deliverable and one of the most important knowledge dissemination instruments of the AMICOM project.
The present volume contains the extended version of the most interesting papers presented at the fifth edition of the MEMSWAVE workshop organized by Uppsala University in July 2004.

The Editors


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