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POSSIBLE USE OF ACOUSTIC WAVE
RESONATORS FOR REMOTE SENSING OF PRESSURE
M. ZHU, P. B. KIRBY
Abstract. A novel idea for remote sensing of pressure device has been
discussed that consists of an FBAR in series with a pressure sensitive
capacitor. The device can be used to tune the resonant frequency and
change in pressures can then be recorded remotely by monitoring the change
in frequency using microwave interrogation. A preliminary design suggests
that the device could measure very low pressures between 8.9 × 10–4
N/m2
and 8.9 × 10–2 N/m2. |