AN INVESTIGATION OF PARTICLE RADIATION EFFECTS IN MIM STRUCTURES
G. J. PAPAIOANNOU, V. THEONAS, M. EXARCHOS

Abstract. Silicon dioxide and silicon nitride coatings are perfectly used as dielectric layers for short-circuit protection in capacitive microwave switches and varactors. However their tendency for electrostatic charging can diminish the device reliability. The charging effect becomes significant when these devices are subjected to ionizing radiation. The irradiation induced charging depends on both the nature of radiation and the underlying metal layers. A simulation of induced damage and generated charge, within the dielectric volume and at the dielectric-metal interfaces is presented. The simulation has been extended on different dielectric materials.

Keywords: MEMS, dielectrics, ionizing radiation, displacement defects.