ABOUT THE BOOK
This volume from the “Micro and Nanoengineering” series (edited by the
Publishing House of the Romanian Academy) includes the papers which
have been presented at the 6th “MEMSWAVE” workshop, organized by EPFL
Lausanne, in the frame of the “AMICOM” Network of Excellence financed
by the EC.
The papers are focused on advanced MEMS technologies for RF and
millimeter wave circuits. MEMS technologies are now one the most
exciting and promising solution to manufacture high performance
millimeter wave circuits to be used in the emerging wireless
This volume is addressed to all interested people from universities,
research institutes or companies working in microwaves, millimeter
waves, and MEMS. It will be distributed to the university libraries.
ABOUT THE EDITORS
Mihai Adrian Ionescu is an Associate Professor at the Swiss
Federal Institute of Technology, Lausanne, Switzerland. He is working
on various subjects in the field of silicon micro/nano-electronics.
EPFL is is partner in NoE "AMICOM".
Anja Skrivervik is Professor at Laboratoire d'Electromagnétisme
et d'Acoustique, EPFL Lausanne. EPFL is is partner in NoE "AMICOM".
Alexandru Müller senior research scientist at the National
Institute for Research and Development in Microtechnologies (IMT
Bucharest), Romania, coordinator of the “MEMSWAVE” European Project
(1998 – 2001), nominated between the ten finalists in the competition
for the Descartes Prize 2002, coordinator of the Romanian team in the
AMICOM FP6 Network of Excellence.
Dan Dascalu member of the Romanian Academy (of Sciences), is
professor of Electronic Engineering at the “Politechnica” University,
Bucharest, Romania, and General Manager of the National Institute for
Research and Development in Microtechnologies (IMT Bucharest),
The evolution of the information society has resulted in a tremendous
increase in the volume of wireless communication often giving rise to
bottle-necks in the communication systems. The huge development of
modern communication systems lead to an overcrowded frequency spectrum
resulting to a continuos increase of the allocated frequencies into
the millimeter wave range and a radical change concerning the
performances, the reconfigurability capabilities and cost of the
electronic modules. Conventional technologies have limitations that
make very difficult to fulfill these requirements. The last years have
seen the emergence of the RF-MEMS technology, that seeks to overcome
these limitations. In this new technology, the mechanical and
electrical functions are combined to improve the performance of
existing devices and circuits, to allow on-wafer system integration
and the creation of completely new microsystems. To realize the RF
microsystem concept, research and collaboration in many different
fields including; fabrication technology, material science,
electromagnetism, micromechanics, thermal and electrical modelling,
characterization, packaging and reliability. is required
The main scope of the MEMSWAVE workshop is to bring together
scientists from different universities, research institutes, and
industrial companies interested in the development of the RF-MEMS
field and to create a forum for the knowledge exchange between the
RF-MEMS players. The workshop is now technically sponsored by the
European Microwave Association (EuMA)
The MEMSWAVE workshop was generated by the European project
“Micromachined Circuites for Microwave and Millimeter Wave
Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT-Bucharest.
The project was nominated between the ten finalists (from 108
participants) to the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized at Sinaia
(Romania) in 1999 and 2001. A special volume in the series Micro and
Nanoengineering “Micromachined Microwave Devices and Circuits” was
dedicated to the second edition of the workshop and was published in
2002. Now the MEMSWAVE workshops became an itinerant European event.
The third edition (2002) of this workshop was organized in Heraklion
(Greece), the forth edition (2003) took place in Toulouse (France)
From 2004 the MEMSWAVE workshop was connected to the European FP6
Network of Excellence in RF MEMS “AMICOM”. Most of the European teams
involved in these challenging topics are partners in the AMICOM
project. The fifth edition in (004 in Uppsala, Sweden and the 6-th
edition in Lausanne Switzerland (2005)–became important instruments
for knowledge dissemination of the AMICOM network results.
It became a tradition to publish the extended version of the best
papers of the Series of Micro and Nanotechnologies of the Romanian
Academy Press. Previous volumes may be requested at IMT-Bucharest
The present volume contains the papers presented at the sixth edition
of the MEMSWAVE workshop organized by EPFL Switzerland in June 2005.