This volume from the “Micro and Nanoengineering” series (edited by the Publishing House of the Romanian Academy) includes the papers which have been presented at the 6th “MEMSWAVE” workshop, organized by EPFL Lausanne, in the frame of the “AMICOM” Network of Excellence financed by the EC.

The papers are focused on advanced MEMS technologies for RF and millimeter wave circuits. MEMS technologies are now one the most exciting and promising solution to manufacture high performance millimeter wave circuits to be used in the emerging wireless communication systems.

This volume is addressed to all interested people from universities, research institutes or companies working in microwaves, millimeter waves, and MEMS. It will be distributed to the university libraries.


Mihai Adrian Ionescu is an Associate Professor at the Swiss Federal Institute of Technology, Lausanne, Switzerland. He is working on various subjects in the field of silicon micro/nano-electronics. EPFL is is partner in NoE "AMICOM".
Anja Skrivervik is Professor at Laboratoire d'Electromagnétisme et d'Acoustique, EPFL Lausanne. EPFL is is partner in NoE "AMICOM".
Alexandru Müller senior research scientist at the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001), nominated between the ten finalists in the competition for the Descartes Prize 2002, coordinator of the Romanian team in the AMICOM FP6 Network of Excellence.
Dan Dascalu member of the Romanian Academy (of Sciences), is professor of Electronic Engineering at the “Politechnica” University, Bucharest, Romania, and General Manager of the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania.


The evolution of the information society has resulted in a tremendous increase in the volume of wireless communication often giving rise to bottle-necks in the communication systems. The huge development of modern communication systems lead to an overcrowded frequency spectrum resulting to a continuos increase of the allocated frequencies into the millimeter wave range and a radical change concerning the performances, the reconfigurability capabilities and cost of the electronic modules. Conventional technologies have limitations that make very difficult to fulfill these requirements. The last years have seen the emergence of the RF-MEMS technology, that seeks to overcome these limitations. In this new technology, the mechanical and electrical functions are combined to improve the performance of existing devices and circuits, to allow on-wafer system integration and the creation of completely new microsystems. To realize the RF microsystem concept, research and collaboration in many different fields including; fabrication technology, material science, electromagnetism, micromechanics, thermal and electrical modelling, characterization, packaging and reliability. is required
The main scope of the MEMSWAVE workshop is to bring together scientists from different universities, research institutes, and industrial companies interested in the development of the RF-MEMS field and to create a forum for the knowledge exchange between the RF-MEMS players. The workshop is now technically sponsored by the European Microwave Association (EuMA)
The MEMSWAVE workshop was generated by the European project “Micromachined Circuites for Microwave and Millimeter Wave Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT-Bucharest. The project was nominated between the ten finalists (from 108 participants) to the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized at Sinaia (Romania) in 1999 and 2001. A special volume in the series Micro and Nanoengineering “Micromachined Microwave Devices and Circuits” was dedicated to the second edition of the workshop and was published in 2002. Now the MEMSWAVE workshops became an itinerant European event. The third edition (2002) of this workshop was organized in Heraklion (Greece), the forth edition (2003) took place in Toulouse (France) From 2004 the MEMSWAVE workshop was connected to the European FP6 Network of Excellence in RF MEMS “AMICOM”. Most of the European teams involved in these challenging topics are partners in the AMICOM project. The fifth edition in (004 in Uppsala, Sweden and the 6-th edition in Lausanne Switzerland (2005)–became important instruments for knowledge dissemination of the AMICOM network results.
It became a tradition to publish the extended version of the best papers of the Series of Micro and Nanotechnologies of the Romanian Academy Press. Previous volumes may be requested at IMT-Bucharest ([email protected]).
The present volume contains the papers presented at the sixth edition of the MEMSWAVE workshop organized by EPFL Switzerland in June 2005.

The editors


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