INVESTIGATION OF INJECTED CARRIER INDUCED POLARIZATION IN MIM CAPACITORS
M. EXARCHOS, V. THEONAS, S. PSYCHIAS, G. KONSTANTINIDIS, G. PAPAIOANNOU

Abstract. The paper investigates the charging that is induced by current injection in dielectric films of MIM capacitors. The amphoteric nature of contributing defects is confirmed under both positive and negative injected currents. The trapped charge induced polarization gives rise to discharge currents that can be described through a stretched exponential relaxation process. This process is thermally activated and depends on the applied electric field magnitude.