A LINEAR MODEL FOR PHASE NOISE IN SILICON MICROELECTRO-MECHANICAL RESONATOR OSCILLATORS
A. SHESHIA

Abstract. A linear predictive model for phase noise in silicon micro-electro-mechanical resonator oscillators is developed and applied to the common trans-resistance amplifier topology. The scaling of phase noise with motional resistance of the micromechanical resonator is discussed. The model enables the formulation of system-level design considerations for low phase noise oscillators embedding silicon micro-electro-mechanical resonators as timing references.