INTEGRATED RF MICROSYSTEMS WITH CMOS-MEMS COMPONENTS
G. K. FEDDER, T. MUKHERJEE

Abstract. Future on-chip low-IF-conversion receiver architectures will benefit from advances in CMOS-MEMS capacitors and mixer-filter components. Single-chip reconfigurable LC filters and VCOs employ multiple MEMS capacitors working in concert. Resonant mixer-filters with 0 dB insertion loss and sub-mW power are achievable through formation of self-assembling gaps in the post-CMOS micromachining technology.