Volume 12 - "Recent Developments in MEMS Technologies"




This volume from the “Micro and Nanoengineering” series (edited by the Publishing House of the Romanian Academy) includes the papers which have been presented at the 8h “MEMSWAVE” workshop, organized by Universitat Politenica de Catalunya, Barcelona, in the frame of the “AMICOM” Network of Excellence financed by the EC.

The papers are focused on emerging MEMS technologies for RF and millimeter wave circuits. MEMS technologies are now one the most exciting and promising solution to manufacture high performance millimeter wave circuits to be used in the emerging wireless communication systems.

This volume is addressed to all interested people from universities, research institutes or companies working in microwaves, millimeter waves, and MEMS. It will be distributed to the university libraries.


Lluis Pradell is Professors at Universitat Politenica de Catalunya, Barcelona, Spain. He is working and teaching on various subjects but mainly in the field microwave circuits and antennas, microwave active devices, multimodal models for guiding-structures and transitions, development of microwave and millimeter-wave systems, and RF & microwave Microelectromechanical Systems (MEMS), in the frequency range 1 GHz to 75 GHz.

Lluis Jofre is Professors at Universitat Politenica de Catalunya, Barcelona, Spain. His research interests include antennas, electromagnetic scattering and imaging, and system miniaturization for wireless and sensing applications.

Alexandru Müller, senior research scientist at the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001), nominated between the ten finalists in the competition for the Descartes Prize 2002, coordinator of the Romanian team in the AMICOM FP6 Network of Excellence (2004-2007).

Dan Dascalu, member of the Romanian Academy (of Sciences), is professor of Electronic Engineering at the “Politechnica” University, Bucharest, Romania, and General Manager of the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania.

Robert Plana, professor at the “Paul Sabatier University” of Toulouse, France and at the “Institute Universitaire de France”, Paris, senior researcher at LAAS CNRS, Toulouse. He was the coordinator of the FP6 Network of Excellence in RF MEMS “AMICOM” (Priority 2, IST).


The huge development of modern communication systems lead to an overcrowded frequency spectrum resulting to a continuous increase of the allocated frequencies into the millimeter wave range and a radical change concerning the performances, the reconfigurability capabilities and cost of the electronic modules. Conventional technologies have limitations that make very difficult to fulfill these requirements. The last years have seen the emergence of the RF-MEMS technology that seeks to overcome these limitations. In this new technology, the mechanical and electrical functions are combined to improve the performance of existing devices and circuits, to allow on-wafer system integration and the creation of completely new microsystems.
A lot of effort has been put into RF-MEMS technologies during the past ten years. A broad range of components and subsystems have been demonstrated, with functions and performances that are significantly improved over conventional microwave and millimetre (mm)-wave technologies.
To realize the RF microsystem concept, research and collaboration in many different fields including fabrication technology, material science, electromagnetism, micromechanics, thermal and electrical modelling, characterization, packaging and reliability is required.
The main scope of the MEMSWAVE workshop is to bring together scientists from different universities, research institutes, and industrial companies interested in the development of the RF-MEMS field and to create a forum for the knowledge exchange between the RF-MEMS players. The workshop is now technically sponsored by the European Microwave Association (EuMA)
The MEMSWAVE workshop was generated by the European project “Micromachined Circuites for Microwave and Millimeter Wave Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT-Bucharest. The project was nominated between the ten finalists (from 108 participants) to the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized in Sinaia (Romania) in 1999 and 2001. A special volume in the series Micro and Nanoengineering “Micromachined Microwave Devices and Circuits” was dedicated to the second edition of the workshop and was published in 2002. Starting from 2002, the MEMSWAVE workshops became an itinerant European event. The next editions were held in Heraklion and Toulouse. From 2004 the MEMSWAVE workshop was connected to the European FP6 Network of Excellence in RF MEMS “AMICOM”. Most of the European teams involved in these challenging topics are partners in the AMICOM project. The workshop was organized in Uppsala (2004), Lausanne (2005), Orvieto (2006), Barcelona (2007) and became important instruments for knowledge dissemination of the AMICOM network results.
It is now a tradition to publish the extended version of the papers of the Series of Micro and Nanotechnologies of the Romanian Academy Press. Previous volumes may be requested at IMT-Bucharest ([email protected]). The present volume contains the papers presented at the 8th edition of the MEMSWAVE workshop organized by the Universitat Politenica de Catalunya, in June 2007, at Barcelona.

The Editors

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