MNE - Series in "Micro and Nanoengineering"

Volume 12 - "Recent Developments in MEMS Technologies"

CONTENT:

FOREWORD	11
MECHANICAL AND ELECTRICAL CHARACTERIZATION OF BENZOCYCLOBUTENE MEMBRANE PACKAGING S. SEOK, N. ROLLAND, P.A. ROLLAND Abstract	13
CO-INTEGRATION OF HIGHLY TUNABLE MEMS CAPACITOR AND HIGH QUALITY FACTOR AlSi INDUCTORS A. MEHDAOUI, C. FILLIT, D. TSAMADOS, R.Y. FILLIT, C. BILLARD, P. ANCEY, A.M. IONESCU Abstract	23
GaAs MEMBRANE-SUPPORTED 60 GHz RECEIVER WITH YAGI-UDA ANTENNA D. NECULOIU, G. KONSTANTINIDIS, T. VÄHÄ-HEIKKILÄ, A. MÜLLER, D. VASILACHE, A. STAVINIDRIS, L. BARY, M. DRAGOMAN, I.PETRINI, C. BUICULESCU, Z. HAZOUPULOS, N. KORNILIOS, P. PURSULA, R. PLANA, D. DASCALU Abstract	33
RF-MEMS SWITCHES FOR W-BAND APPLICATIONS A. STEHLE, V. ZIEGLER, B. SCHÖNLINNER, U. PRECHTEL, H. SEIDEL, U. SCHMID Abstract	41
RF MEMS MATRICES FOR SPACE APPLICATIONS S. CATONI, S. DI NARDO, P. FARINELLI, F. GIACOMOZZI, G. MANNOCCHI, R. MARCELLI, B. MARGESIN, P. MEZZANOTTE, V. MULLONI, D. POCHESCI, R. SORRENTINO, F. VITULLI, L. VIETZORRECK Abstract	49
AN IMPROVED RELIABILITY SWITCHING NETWORK DESIGN BASED ON DC CONTACT MEMS SWITCHES DEDICATED TO SWITHING MATRIX APPLICATIONSM EL KHATIB, A. POTHIER, A. CRUNTEANU, O. VENDIER, J.L. CAZAUX, P. BLONDY Abstract	59
A NOVEL STRUCTURE OF RF MEMS CAPACITIVE SERIES SWITCH FOR AVOIDING POWER INDUCED STICTION J.D. MARTINEZ, P. BLONDY, A. POTHIER, D. BOUYGE,A. CRUNTEANU, M. CHATRAS Abstract	67
FBAR OVERTONE–BASED OSCILLATORS USING 90 nm CMOS M. ELBARKOUKY, P. WAMBACQ, Y. ROLAIN Abstract	77
MEMS RECONFIGURABLE INSET-FED PATCH ANTENNA INHERENTLY MATCHED OVER A WIDE FREQUENCY RANGE P. ARCIONI, L. PERREGRINI, G. CONCIAURO Abstract	85
PYRAMIDAL CIRCULARLY POLARIZED ANTENNA WITH RF-MEMS SWITCHES FOR FREQUENCY FLEXIBILITY S. HEBIB, H. AUBERT, O. PASCAL, N.J.G. FONSECA, L. RIES, J.M.E. LÓPEZ Abstract	91
DESIGN AND REALIZATION OF A MEMS-TUNED REFLECTARRAY ON LTCC SUBSTRATE J. PERRUISSEAU-CARRIER, H. LEGAY, J. LENKKERI, J.-P. POLIZZI, E. JUNG, A.K. SKRIVERVIK Abstract	97
MEMS RECONFIGURABLE PATCH ANTENNA ANALYSIS USING WIPL-D C. MEDEIROS, J.R. COSTA, C.A. FERNANDES, B. KOLUNDZIJA Abstract	107
A DUAL-GAP TUNABLE RF MEMS CAPACITOR FOR REFLECTARRAY APPLICATIONS G. LISSORGUES, F. FLOURENS, A. PHOMMAHAXAY, F. MARTY, L. ROUSSEAU, C. PAPON, P. NICOLE, T. DOUSSET Abstract	117
MODIFIED LADDER-TYPE BAW FILTER FOR AN OUT-OF-BAND REJECTION IMPROVEMENT J. VERDÚ, O. MENÉNDEZ, P. DE PACO Abstract	127
INTEGRATED TRANSFORMERS FOR RF APPLICATIONS. ANALYSIS OF THE WIDTH OF TRACKS Y. SANCHEZ, A. BERIAIN, I. CENDOYA, I. SANCHO, J. MELENDEZ, I. GUTIERREZ Abstract	137
DESIGN AND CHARACTERIZATION OF A BULK-ACOUSTIC-RESONATOR (FBAR) H. CAMPANELLA, A. URANGA, P. NOUET, N. BARNIOL, L. TERÉS, J. ESTEVE Abstract	147
EPITAXIAL ALN THIN FILMS FOR RF APPLICATIONS J.C. MORENO, F. SEMOND, E. FRAYSSINET, J. MASSIES, R. VELARD, X. GAGNARD Abstract	155
PLANAR SPIRAL INDUCTORS WITH MEMS TECHNOLOGY E.U. TEMOCIN, H.I. ATASOY, K. TOPALLI, M. UNLU, I. ISTANBULLUOGLU, O. BAYRAKTAR, S. DEMIR, O.A. CIVI, S. KOC, T. AKIN Abstract	161
MICROFABRICATION OF HIGH FREQUENCY RECTANGULAR COAXIAL CABLE USING SU8 PHOTORESIST M. KE, Y. WANG, J. ZHOU, K. JIANG, M.J. LANCASTER Abstract	167
DIMENSIONING OF ELECTROMAGNETIC COUPLERS FOR 0-LEVEL PACKAGED MICROWAVE POWER LIMITERS BASED ON ELECTRON EMITTER ARRAY A. PHOMMAHAXAY, G. LISSORGUES, L. ROUSSEAU, T. BOUROUINA, P. NICOLE Abstract	173
DESIGN AND REALIZATION OF A MEMS TUNEABLE REFLECTARRAY FOR MM-WAVE IMAGING APPLICATION B. MENCAGLI, P. FARINELLI, L. MARCACCIOLI, R. VINCENTI GATTI, B. MARGESIN, F. GIACOMOZZI, R. SORRENTINO Abstract	183
MONOLITHICALLY INTEGRATED MEMS PHASED ARRAY K. TOPALLI, O. AYDIN CIVI, S. DEMIR, S. KOC, T. AKIN Abstract	191
RF NEMS- CARBON- NANOTUBE BASED NANOELECTRO-MECHANICAL SYSTEMS FOR MICROWAVE AND MILLIMETER WAVE APPLICATIONS M. DRAGOMAN, A. CISMARU, A.A. MULLER, D. DRAGOMAN, H. HARTNAGEL, R PLANA Abstract	199
TUNING BEAM ELECTROMECHANICAL RESONATORS F. CASSET, C. DURAND, P. ANCEY, M. AÏD, L. BUCHAILLOT Abstract	205
TOWARDS A TUNABLE VHF FULLY INTEGRATED MEMS- MIXLER A. URANGA, J. VERD, J.L LÓPEZ, J. TEVA, G. ABADAL, F. TORRES, J. ESTEVE, F. PÉREZ-MURANO, N. BARNIOL Abstract	213
DESIGN OF A 2-POLE DIGITALLY TUNABLE RF MEMS FILTER BASED ON A HYBRID SIMULATION APPROACH M. HOUSSINI, A. POTHIER, P. BLONDY, A. CRUNTEANU, P. TRISTANT Abstract	223
TUNABLE BANDSTOP MEMS FILTERS FOR Ka AND V-BAND APPLICATIONS A. TAKACS, D. NECULOIU, D. VASILACHE, A. MULLER, P. PONS, L. BARY, P. CALMON, R. PLANA, H. AUBERT Abstract	229
NOVELL MICROMACHINED LUMPED ELEMENT BANDPASS FILTER WITH AN ADDITIONAL ZERO IN THE BANDSTOP, FOR WLAN 5200 APPLICATIONS A. MULLER, D. NECULOIU, D. VASILACHE, A. CISMARU, P. PONS, R. PLANA, L. BARY, A. MULLER Abstract	237
MEMS SWITCHES WITH STEPPED PULL-DOWN VOLTAGE FOR TUNABLE PHASE SHIFTERS P. FARINELLI, V. LEUS, A. OCERA, B. MARGESIN, D. ELATA, R. SORRENTINO Abstract	245
RF-MEMS BASED 2-BIT REFLECTIVE PHASE SHIFTER AT X-BAND FOR RECONFIGURABLE REFLECT-ARRAY ANTENNAS C. SIEGEL, V. ZIEGLER, B. SCHÖNLINNER, U. PRECHTEL, H. SCHUMACHER Abstract	253
DOUBLE STUB AND TRIPLE STUB RF MEMS IMPEDANCE TUNERS M. UNLU, H.I. ATASOY, S. DEMIR, O.A. CIVI, S. KOC, T. AKIN Abstract	259
CHARGING PROCESSES IN RF-MEMS CAPACITIVE SWITCHES WITH SiO2 DIELECTRIC G.J. PAPAIOANNOU, F. GIACOMOZZI, E. PAPANDREOU, B. MARGESIN Abstract	267
DIELECTRIC MATERIAL CHARGING AND ESD STRESS OF ALN-BASED CAPACITIVE RF MEMS J. RUAN, N. NOLHIER, M. BAFLEUR, L. BARY,N. MAURAN, F. COCCETTI, T. LISEC, R. PLANA Abstract	277
SERIES AND SHUNT RF MEMS SWITCHES WITH DIELECTRIC MEMBRANE FOR WPAN AD HOC NETWORKS A. BOE, M. FRYZIEL, N. DEPARIS, C. LOYEZ, L. LE GARREC, N. ROLLAND, P.-A. ROLLAND Abstract	285
RF-MEMS MANUFACTURING PROCESS ON GaAs SUBSTRATE FULLY COMPATIBLE WITH MMICs F. CHERUBINI, P. FARINELLI, A. OCERA, S. LAVANGA, L. VENTURELLI, C. LANZIERI, A. CETRONIO, R. SORRENTINO Abstract	293
NOVEL COMPACT MEMS-TUNABLE DIRECTIONAL COUPLER FOR DUAL BAND WIRELESS APPLICATIONS A. OCERA, P. FARINELLI, F. CHERUBINI, P. MEZZANOTTE, R. SORRENTINO, B. MARGESIN, F. GIACOMOZZI Abstract	301
DESIGN AND FABRICATION OF RF MEMS SHUNT SWITCHES WITH HIGH ISOLATION X.L. EVANS, S.J.N. MITCHELL, P.V. RAINEY, H.S. GAMBLE, N.B. BUCHANAN, V.F. FUSCO Abstract	309
NOVEL MICROSTRIP DISTRIBUTED RF MEMS PHASE SHIFTERS FOR PHASED ARRAY APPLICATIONS V. JANARDHANA, S. PAMIDIGHANTAM, R.G. KULKARNI, J.S. ROY Abstract	317
MICROWAVE NARROWBAND FILTERS USING SINGLE AND STACKED COAXIAL LINES A. JAIMES-VERA, I. LLAMAS-GARRO, A. CORONA-CHAVEZ, I. ZALDIVAR-HUERTA Abstract	327
DISTRIBUTED PARAMETRIC SIMULATION OF COMPLEX ELECTROMAGNETIC STRUCTURES IN GRID COMPUTING ENVIRONMENT F. KHALIL, H. AUBERT, F. COCCETTI, R. PLANA, T. VÄHÄ-HEIKKILÄ, T. LISEC Abstract	335
REDUCTION OF STICKING EFFECT IN MICRO-SWITCH BY RESTORING FORCE ENHANCEMENT H. ACHKAR, D. PEYROU, F. PENNEC, P. PONS, R. PLANA, M. SARTOR Abstract	343
AFM ANALYSIS OF DIELECTRIC CHARGING FOR MEMS CAPACITIVE SWITCHES RELIABILITY M. LAMHAMDI, A. BELARNI, P. PONS, L. BOUDOU, J. GUASTAVINO, Y. SEGUI, M. DILHAN, R. PLANA Abstract	353
ELECTROTHERMALLY-ACTUATED RF-MEMS DEVICES MANUFACTURED ON A LOW-RESISTIVITY SUBSTRATE D. GIRBAU, L.L. PRADELL, M.A. LLAMAS, A. LÁZARO, A. NEBOT Abstract	361
EFFECT OF CONTACT FORCE BETWEEN ROUGH SURFACES ON REAL CONTACT AREA AND ELECTRICAL CONTACT RESISTANCE D. PEYROU, F. PENNEC, H. ACHKAR, PPONS, R. PLANA Abstract	371