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Volume 20 - "NOVEL RF MEMS TECHNOLOGIES"
CONTENT:
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FOREWORD |
9 |
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RECONFIGURABLE RF-MEMS CIRCUITS AND LOW NOISE AMPLIFIERS
FABRICATED USING A GaAs MMIC FOUNDRY PROCESS TECHNOLOGY
R. MALMQVIST, C. SAMUELSSON, A. GUSTAFSSON,
D. SMITH, T. VÄHÄ-HEIKKILÄ, AND R. BAGGEN
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11 |
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TUNABLE VIA-FREE MICROSTRIP COMPOSITE RIGHT/LEFTHANDED
TRANSMISSION LINES USING MEMS TECHNOLOGY
T. KIM, L. VIETZORRECK
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18 |
WAVEGUIDE-MOUNTED RF MEMS FOR TUNABLE W-BAND
ANALOG TYPE PHASE SHIFTER
D. PSYCHOGIOU, J. HESSELBARTH, Y. LI, S. KÜHNE, C. HIEROLD |
25 |
MEMS-BASED FREQUENCY-TUNABLE REFLECT-LINE PHASE SHIFTER
F. CONGEDO, G. MONTI, L. TARRICONE, P. FARINELLI, R. SORRENTINO,
J. IANNACCI, V. MULLONI, B. MARGESIN |
32 |
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9.6-11.7 GHz ANALOGICALLY TUNED BAND STOP FILTER BASED
ON RF-MEMS VARACTORS
D. MARDIVIRIN, F. BARRIÈRE, A. POTHIER,
A. CRUNTEANU, P. BLONDY |
38 |
DESIGN OF ULTRA-WIDEBAND FILTER WITH EMBEDDED
RF-MEMS BASED RECONFIGURABLE NOTCHED BAND
L. PELLICCIA, F. CASINI, F. CACCIAMANI,
P. FARINELLI, R. SORRENTINO |
45 |
LOW-LOSS DISTRIBUTED 2-BIT RF MEMS PHASE SHIFTER
FOR 60GHz APPLICATIONS
C. NDIAYE, A. POTHIER, C. GUINES, P.BLONDY |
51 |
OPTIMIZATION OF A HIGH-POWER Ka-BAND RF MEMS
2-BIT PHASE SHIFTER ON SAPPHIRE SUBSTRATE
B. ESPANA, B. BELENGER, S. COURREGES, P. BLONDY,
O. VENDIER, D. LANGREZ, J.-L. CAZAUX |
59 |
DESIGN OF SELECTABLE-BAND PATCH FILTER FOR WiMAX
APPLICATIONS USING MEMS VARACTOR
G. REHDER, A.L.C. SERRANO, F.S. CORRERA, M.N.P. CARREÑO |
70 |
TUNABLE METAMATERIAL DEVICES BY MEANS OF
TWO-HOT-ARM ELECTROTHERMAL ACTUATORS
A.X. LALAS, N.V. KANTARTZIS, T.V. YIOULTSIS,
T.D. TSIBOUKIS |
77 |
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DESIGN OF OHMIC MINIATURE MEMS COMPONENTS FOR
FAST RECONFIGURATION
A. VERGER, A. POTHIER, C. GUINES, A. CRUNTEANU, P. BLONDY,
J.-C. ORLIANGES, J. DHENNIN, F. COURTADE, O. VENDIER |
87 |
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CAPACITANCE TUNING BEHAVIOR OF A BiCMOS
EMBEDDED RF-MEMS SWITCH
M. KAYNAK, M. WIETSTRUCK, W. ZHANG,
R. SCHOLZ, B. TILLACK |
93 |
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FLOATING ELECTRODE MICROELECTROMECHANICAL SYSTEM
CAPACITIVE SWITCHES: A DIFFERENT ACTUATION MECHANISM
E. PAPANDREOU, S. COLPO, M. KOUTSOURELI, F. GIACOMOZZI,
G. PAPAIOANNOU, B. MARGESIN |
102 |
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A HIGHLY-REPEATABLE, BROADBAND 180º PHASE SWITCH
FOR INTEGRATED MEMS PROCESSES
M.A. LLAMAS, D. GIRBAU, M. RIBÓ, L. PRADELL, F. GIACOMOZZI,
S. COLPO, F. COCCETTI, S. AOUBA |
109 |
FLOATING ELECTRODE MICROELECTROMECHANICAL SYSTEM
CAPACITIVE SWITCHES: A DIFFERENT ACTUATION MECHANISM
E. PAPANDREOU, S. COLPO, M. KOUTSOURELI, F. GIACOMOZZI,
G. PAPAIOANNOU, B. MARGESIN |
102 |
A HIGHLY-REPEATABLE, BROADBAND 180º PHASE SWITCH
FOR INTEGRATED MEMS PROCESSES
M.A. LLAMAS, D. GIRBAU, M. RIBÓ, L. PRADELL, F. GIACOMOZZI,
S. COLPO, F. COCCETTI, S. AOUBA |
109 |
LARGE FRACTIONAL BANDWIDTH BAW FILTER
M. CHATRAS, L. CATHERINOT, S. BILA, P. BLONDY,
D. CROS, T. BARON, S. BALLANDRAS,
P. MONFRAIX, L. ESTAGERIE |
116 |
AN ANALOGICALLY TUNED CAPACITOR WITH
RF MEMS STRUCTURE
F. BARRIERE, D. MARDIVIRIN, A. POTHIER,
A. CRUNTEANU, P. BLONDY |
122 |
QUASI-ANALOG MULTI-STEP TUNING OF LATERALLY-MOVING
CAPACITIVE ELEMENTS INTEGRATED IN 3D MEMS
TRANSMISSION LINES
E. PAPANDREOU, S. COLPO, M. KOUTSOURELI, F. GIACOMOZZI,
G. PAPAIOANNOU, B. MARGESIN |
128 |
A HIGHLY-REPEATABLE, BROADBAND 180º PHASE SWITCH
FOR INTEGRATED MEMS PROCESSES
M.A. LLAMAS, D. GIRBAU, M. RIBÓ, L. PRADELL, F. GIACOMOZZI,
S. COLPO, F. COCCETTI, S. AOUBA |
109 |
QUASI-ANALOG MULTI-STEP TUNING OF LATERALLY-MOVING
CAPACITIVE ELEMENTS INTEGRATED IN 3D MEMS
TRANSMISSION LINES
U. SHAH, M. STERNER, J. OBERHAMMER |
128 |
A HIGHLY-REPEATABLE, BROADBAND 180º PHASE SWITCH
FOR INTEGRATED MEMS PROCESSES
M.A. LLAMAS, D. GIRBAU, M. RIBÓ, L. PRADELL, F. GIACOMOZZI,
S. COLPO, F. COCCETTI, S. AOUBA |
109 |
QUASI-ANALOG MULTI-STEP TUNING OF LATERALLY-MOVING
CAPACITIVE ELEMENTS INTEGRATED IN 3D MEMS
TRANSMISSION LINES
U. SHAH, M. STERNER, J. OBERHAMMER |
128 |
TERAHERTZ DIODE ON AlGaN MICROCATHODE
N.M. GONCHARUK |
135 |
HIGH FREQUENCY CNT BASED RESONATOR FOR
DNA DETECTION
A. CISMARU, M. DRAGOMAN, A. RADOI, M. VOICU,
A. BUNEA, M. CARP, A. DINESCU |
143 |
DESIGN OF RF FEEDTHROUGHS IN ZERO-LEVEL PACKAGING
FOR RF MEMS IMPLEMENTING TSVs
H. EL GANNUDI, V. CHERMAN, P. FARINELLI, N.P. PHAM,
L. BOGAERTS, H.A.C. TILMANS, R. SORRENTINO |
151 |
MATERIAL PROPERTIES CHARACTERIZATION OF BiCMOS BEOL
METAL STACKS FOR RF-MEMS APPLICATIONS
M. WIETSTRUCK, M. KAYNAK, W. ZHANG, D. WOLANSKY,
S. KURTH, B. ERLER, B. TILLACK |
161 |
CHARGE TRAP INVESTIGATION METHODOLOGY ON RF-MEMS
SWITCHES
M. BARBATO, V. GILIBERTO, A. MASSENZ, F. DI MAGGIO, M. DISPENZA,
P. FARINELLI, B. MARGESIN,E. CARPENTIERI, U.D'ELIA, I. POMONA,
M. TULUI, F. CASINI, R. SORRENTINO, E. ZANONI, G. MENEGHESSO |
171 |
DIELECTRIC CHARGING IN CAPACITIVE RF MEMS SWITCHES:
THE EFFECT OF DIELECTRIC FILM LEAKAGE
N. TAVASOLIAN, M. KOUTSOURELI, G. PAPAIOANNOU,
J. PAPAPOLYMEROU |
181 |
LOW TEMPERATURE PHOTOSESITIVE FILM-TYPE PERMX POLYMER
ZERO-LEVEL PACKAGING TECHNIQUE FOR RF APPLICATIONS
S. SEOK, J. KIM, N. ROLLAND, P.-A. ROLLAND |
185 |
CONTROLLABLE ARTIFICIAL MICRO-TRANSMISSION LINES
J. PERRUISSEAU-CARRIER, F. BONGARD |
193 |
MEMS AND COMBINED MEMS/LC TECHNOLOGY FOR
mm-WAVE ELECTRONIC SCANNING REFLECTARRAYS
S. MONTORI, C. FRITZSCH, ELISA CHIUPPESI, P. FARINELLI,
L. MARCACCIOLI, F. GIACOMOZZI, R. SORRENTINO,
R. JACOBY |
203 |
SILICON SUPPORTED MILLIMETER WAVE CRLH ANTENNA
MICROPROCESSED BY LASER ABLATION
A.-C. BUNEA, F. CRACIUNOIU, M. ZAMFIRESCU,
R. DABU, G. SAJIN |
211 |
FREQUENCY-RECONFIGURABLE E-PLANE FILTERS
USING MEMS SWITCHES
L. PELLICCIA, P. FARINELLI, R. SORRENTINO |
221 |
5-BIT MEMS PHASE SHIFTER
F. CASINI, P. FARINELLI, E. CHIUPPESI, G. RESTA, G.R.F. SOLAZZI,
S. COLPO, F. Di MAGGIO, I. POMONA |
228 |
IMPROVED INSERTION LOSS FOR A WR-3 WAVEGUIDE
USING FULLY CROSS-LINKED TWO-LAYER SU8
PROCESSING TECHNOLOGY
M. KE, X. SHANG, Y. WANG, M.J. LANCASTER |
232 |
A NEW APPROACH TO WAFER LEVEL THIN-FILM
ENCAPSULATION FOR RF-MEMS
V. MULLONI, S. COLPO, H. EL GHANNUDI,
F. GIACOMOZZI, B. MARGESIN |
238 |
IMPROVING CONTROLLABILITY IN RF-MEMS SWITCHES
USING RESISTIVE DAMPING
M. SPASOS, N. CHARALAMPIDIS,
K. TSIAKMAKIS, R. NILAVALAN |
245 |
MILLIMETER WAVE CRLH CPW BAND-PASS FILTER ON
SILICON AND CERAMIC SUBSTRATE
G. SAJIN, F. CRACIUNOIU, A.-C. BUNEA, A. A. MULLER,
A. DINESCU, M. ZAMFIRESCU, R. DABU |
250 |
TAPERED WALLS VIA HOLES MANUFACTURED USING
DRIE VARIABLE ISOTROPY PROCESS
D. VASILACHE, S. RONCHIN, S. COLPO, B. MARGESIN,
F. GIACOMOZZI, S. GENNARO |
259 |
MAGNETO-MECHANICAL MODELING AND SIMULATION OF
MEMS SENSORS BASED ON ELECTROACTIVE POLYMERS
F.J.O. RODRIGUES, L.M. GONÇALVES, J.H. CORREIA,
P.M. MENDES |
268 |
NEAR MILLIMETER-WAVE BUILDING BLOCKS BASED ON
NOVEL COAXIAL TO SIW TRANSITION
V. BUICULESCU, A. CISMARU |
277 |
DISTRIBUTED MEMS TUNABLE PHASE SHIFTERS ON CMOS
TECHNOLOGY FOR MILLIMETER WAVE FREQUENCIES
G. REHDER, B. BLAMPEY, T. VO, P. FERRARI |
284 |
DESIGN AND MODELING OF MEMBRANE SUPPORTED
FBAR FILTER
A. STEFANESCU, D. NECULOIU, A.-C. BUNEA |
291 |
CHARACTERISTICS OF SMOOTH-WALLED SPLINE-PROFILE
HORNS FOR TIGHTLY PACKED FEED-ARRAY OF
RATAN-600 RADIO TELESCOPE
N. POPENKO, R. CHERNOBROVKIN, I. IVANCHENKO,
C. GRANET, V. KHAIKIN |
301 |
COMPACT PLANAR DIELECTRIC DISK ANTENNAS
FOR X- AND KU- BANDS
I.V. IVANCHENKO, M.M. KHRUSLOV, N.A. POPENKO |
307 |
EFFECT OF WORKING ENVIRONMENT ON STICTION MECHANISMS
IN ELECTROSTATIC RF-MEMS SWITCHES
U. ZAGHLOUL, G. PAPAIOANNOU, B. BHUSHAN,
P. PONS, F. COCCETTI, R. PLANA |
313 |
THE DISCHARGE CURRENT THROUGH THE DIELECTRIC
FILM IN MEMS CAPACITIVE SWITCHES
M. KOUTEOURELI, L. MICHALAS, G. PAPAIOANNOU |
323 |
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