Volume 25 - "Novel Technologies for microwave and millimeter wave devices and circuits"

CONTENT:
 

FOREWORD

7

MICROMACHINED WAVEGUIDE INTEGRATED RF MEMS
SWITCH OPERATING BETWEEN 500-750 GHz,
U. SHAH, T. RECK, E. DECROSSAS, C. JUNG-KUBIAK, H. FRID, G. HATTOPADHYAY, I. MEHDI and J. OBERHAMMER

9

RF PAD OPTIMIZATION FOR A 140 GHz  RF-MEMS SWITCH,
S. TOLUNAY WIPF, A. GÖRITZ, M. WIETSTRUCK, C. WIPF, B. TILLACK, M. KAYNAK

17

KAPTON FLEXIBLE TECHNOLOGY FOR V-BAND APPLICATIONS,
Z. YANG, A. TAKACS, S. CHARLOT, D. DRAGOMIRESCU

24

SMART MEMS PIEZO BASED ENERGY HARVESTING WITH INTEGRATED SUPERCAPACITOR AND PACKAGING,
C. RUSU, A. ALVANDPOUR, P. ENOKSSON, T. BRAUN, S. TIEDKE, R. DAL MOLIN, G. FÉRIN, E. VIINIKKA, T. EBEFORS

32

ANALYSIS OF DIELECTRIC CHARGING ASSESSMENT
THROUGH UP-STATE CAPACITANCE-VOLTAGE
CHARACTERISTIC IN MEMS CAPACITIVE SWITCHES,
M. KOUTSOURELI, D. BIRMPILIOTIS, L. MICHALAS and G. PAPAIOANNOU

42

0.13 µm BiCMOS EMBEDDED ON-CHIP HIGH-VOLTAGE CHARGE PUMP WITH STACKED BEOL CAPACITORS FOR RF-MEMS APPLICATIONS,
M. WIETSTRUCK, W. WINKLER, A. GÖRITZ, S. TOLUNAY-WIPF, C. WIPF, D. SCHMIDT, A. MAI, and M. KAYNAK

52

MEMS VARACTOR MODELING METHODOLOGY FOR INTERACTIVE ELECTROMECHANICAL SIMULATION WITH HIGH ACCURACY, G. KAHMEN, M. WIETSTRUCK and H. SCHUMACHER

61

MULTILAYER MICROMACHINING TECHNOLOGY FOR THE FABRICATION OF Ka BAND FILTERS, B. MARGESIN, F. GIACOMOZZI, P. FARINELLI

68

ELECTRICAL PROPERTIES OF SiNX FILMS DOPED WITH CNTs FOR MEMS
CAPACITIVE SWITCHES, M. KOUTSOURELI, G. STAVRINIDIS,
G. KONSTANTINIDIS, G. PAPAIOANNOU

78

WIDELY TUNABLE MEMS LC TANK FOR MULTI-BAND APPLICATIONS,
A.CAZZORLA, P. FARINELLI, F. GIACOMOZZI, R. SORRENTINO

88

FABRICATION AND CHARACTERIZATION OF THERMOELECTRIC GENERATORS AS IN SITU TEMPERATURE SENSOR FOR III-NITRIDE-BASED
POWER TRANSISTORS, C. KOLIAKOUDAKIS, A. STAVRINIDIS, A. KOSTOPOULOS, K. TSAGARAKI, K. VAMVOUKAKIS, M. KAYIAMBAKI,
V. PRUDKOVSKIY, G. DELIGEORGIS, N. KORNILIOS, G. KONSTANTINIDIS

97

COMPACT PHASE SHIFTING CELL BASED ON MICRO-STRIP SLOW WAVE LINES, M. GASTALDI, D. DRAGOMIRESCU, A. TAKACS, V. ARMENGAUD