ABOUT THE BOOK
This volume from the “Micro and Nanoengineering” series (edited by
the Publishing House of the Romanian Academy) includes the papers
which have been presented at the 9th “MEMSWAVE”
workshop, organized by Foundation for Research & Technology Hellas
(FORTH) in July 2008, at Fodele, Greece.
The papers are focused on new development in MEMS technologies for
RF and millimeter wave circuits. MEMS technologies are now one the
most exciting and promising solution to manufacture high
performance millimeter wave circuits to be used in the emerging
wireless communication systems.
This volume is addressed to all interested people from
universities, research institutes or companies working in
microwaves, millimeter waves, and MEMS. It will be distributed to
the university libraries.
ABOUT THE EDITORS
George Konstantinidis, senior scientist at Microelectronics
Research Group, institute of Electronic Structure & Laser,
Foundation for research & technology – Hellas (FORTH), Heraklion,
Greece. He is also coordinating MRG's effort in micromachining
technology with emphasis on RF-MEMS.
Alexandru Müller, senior research scientist at the National
Institute for Research and Development in Microtechnologies (IMT
Bucharest), Romania, coordinator of the “MEMSWAVE” European
Project (1998 – 2001), nominated between the ten finalists in the
competition for the Descartes Prize 2002. He is now the
coordinator of the FP7 (CSA) project MIMOMEMS.
Dan Dascălu, member of the Romanian Academy (of Sciences),
is professor of Electronic Engineering at the “Politechnica”
University, Bucharest, Romania, and General Manager of the
National Institute for Research and Development in
Microtechnologies (IMT Bucharest), Romania.
Robert Plana, professor at the “Paul Sabatier University”
of Toulouse, France and senior researcher at LAAS CNRS, Toulouse.
He was the coordinator of the FP6 Network of Excellence in RF MEMS
“AMICOM” (Priority 2, IST). Prof R Plana is now heading a research
group at LAAS-CNRS in the field of Micro and Nanosystem for
A lot of effort has been put into RF-MEMS technologies during the
past years. In this new technology, the mechanical and electrical
functions are combined to improve the performance of existing
devices and circuits, to allow on-wafer system integration and the
creation of completely new Microsystems. A broad range of
components and subsystems have been demonstrated, with functions
and performances that are significantly improved over conventional
microwave and millimetre (mm)-wave technologies.
To realize the RF microsystem concept, research and collaboration
in many different fields including fabrication technology,
material science, electromagnetism, micromechanics, thermal and
electrical modelling, characterization, packaging and reliability
is required. The main scope of the MEMSWAVE workshop is to bring
together scientists from different universities, research
institutes, and industrial companies interested in the development
of the RF-MEMS field and to create a forum for the knowledge
exchange between the RF-MEMS players. The workshop is now
technically sponsored by the European Microwave Association (EuMA)
The MEMSWAVE workshop was generated by the European project
“Micromachined Circuites for Microwave and Millimeter Wave
Applications” <<MEMSWAVE>> (1998-2001) coordinated by
IMT-Bucharest. The project was nominated between the ten finalists
(from 108 participants) to the Descartes Prize 2002.
The first 2 editions of the MEMSWAVE workshop were organized at
Sinaia (Romania) in 1999 and 2001. A special volume in the series
Micro and Nanoengineering “Micromachined Microwave Devices and
Circuits” was dedicated to the second edition of the workshop and
was published in 2002. Starting from 2002, the MEMSWAVE workshops
became an itinerant European event. The next editions were held in
Heraklion and Toulouse. From 2004 the MEMSWAVE workshop was
connected to the European FP6 Network of Excellence in RF MEMS
“AMICOM” and was strongly supported by this network. Most of the
European teams involved in these challenging topics were partners
in the AMICOM project. The workshop was organized in Uppsala
(2004), Lausanne (2005), Orvieto (2006), Barcelona (2007) and
became important instruments for knowledge dissemination of the
AMICOM network results.
In 2008 took place the first MEMSWAVE following the completion of
AMICOM. However, the significant number of contribution has
manifested the lasting support of the European RF MST community to
It is now a tradition to publish the extended version of the
papers of the Series of Micro and Nanotechnologies of the Romanian
Academy Press. Previous volumes may be requested at IMT-Bucharest
(print[at]imt.ro). The present volume contains the papers
presented at the 9th edition of the MEMSWAVE workshop
organized by the Foundation for Research & Technology Hellas
(FORTH) in July 2008, at Fodele, Greece.