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This volume from the “Micro and Nanoengineering” series (edited by the Publishing House of the Romanian Academy) includes the papers which have been presented at the 9th “MEMSWAVE” workshop, organized by Foundation for Research & Technology Hellas (FORTH) in July 2008, at Fodele, Greece.

The papers are focused on new development in MEMS technologies for RF and millimeter wave circuits. MEMS technologies are now one the most exciting and promising solution to manufacture high performance millimeter wave circuits to be used in the emerging wireless communication systems.

This volume is addressed to all interested people from universities, research institutes or companies working in microwaves, millimeter waves, and MEMS. It will be distributed to the university libraries.


George Konstantinidis, senior scientist at Microelectronics Research Group, institute of Electronic Structure & Laser, Foundation for research & technology – Hellas (FORTH), Heraklion, Greece. He is also coordinating MRG's effort in micromachining technology with emphasis on RF-MEMS.

Alexandru Müller, senior research scientist at the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania, coordinator of the “MEMSWAVE” European Project (1998 – 2001), nominated between the ten finalists in the competition for the Descartes Prize 2002. He is now the coordinator of the FP7 (CSA) project MIMOMEMS.

Dan Dascălu, member of the Romanian Academy (of Sciences), is professor of Electronic Engineering at the “Politechnica” University, Bucharest, Romania, and General Manager of the National Institute for Research and Development in Microtechnologies (IMT Bucharest), Romania.

Robert Plana, professor at the “Paul Sabatier University” of Toulouse, France and senior researcher at LAAS CNRS, Toulouse. He was the coordinator of the FP6 Network of Excellence in RF MEMS “AMICOM” (Priority 2, IST). Prof R Plana is now heading a research group at LAAS-CNRS in the field of Micro and Nanosystem for wireless communications.


A lot of effort has been put into RF-MEMS technologies during the past years. In this new technology, the mechanical and electrical functions are combined to improve the performance of existing devices and circuits, to allow on-wafer system integration and the creation of completely new Microsystems. A broad range of components and subsystems have been demonstrated, with functions and performances that are significantly improved over conventional microwave and millimetre (mm)-wave technologies.

To realize the RF microsystem concept, research and collaboration in many different fields including fabrication technology, material science, electromagnetism, micromechanics, thermal and electrical modelling, characterization, packaging and reliability is required. The main scope of the MEMSWAVE workshop is to bring together scientists from different universities, research institutes, and industrial companies interested in the development of the RF-MEMS field and to create a forum for the knowledge exchange between the RF-MEMS players. The workshop is now technically sponsored by the European Microwave Association (EuMA)

The MEMSWAVE workshop was generated by the European project “Micromachined Circuites for Microwave and Millimeter Wave Applications” <<MEMSWAVE>> (1998-2001) coordinated by IMT-Bucharest. The project was nominated between the ten finalists (from 108 participants) to the Descartes Prize 2002.

The first 2 editions of the MEMSWAVE workshop were organized at Sinaia (Romania) in 1999 and 2001. A special volume in the series Micro and Nanoengineering “Micromachined Microwave Devices and Circuits” was dedicated to the second edition of the workshop and was published in 2002. Starting from 2002, the MEMSWAVE workshops became an itinerant European event. The next editions were held in Heraklion and Toulouse. From 2004 the MEMSWAVE workshop was connected to the European FP6 Network of Excellence in RF MEMS “AMICOM” and was strongly supported by this network. Most of the European teams involved in these challenging topics were partners in the AMICOM project. The workshop was organized in Uppsala (2004), Lausanne (2005), Orvieto (2006), Barcelona (2007) and became important instruments for knowledge dissemination of the AMICOM network results.

In 2008 took place the first MEMSWAVE following the completion of AMICOM. However, the significant number of contribution has manifested the lasting support of the European RF MST community to this event.

It is now a tradition to publish the extended version of the papers of the Series of Micro and Nanotechnologies of the Romanian Academy Press. Previous volumes may be requested at IMT-Bucharest (print[at]imt.ro). The present volume contains the papers presented at the 9th edition of the MEMSWAVE workshop organized by the Foundation for Research & Technology Hellas (FORTH) in July 2008, at Fodele, Greece.

The Editors

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