Volume 15 - "NEW DEVELOPMENTS IN MICRO ELECTRO MECHANICAL SYSTEMS FOR RADIO FREQUENCY AND MILLIMETER WAVE APPLICATIONS"

CONTENT:
 

FOREWORD

11

HOW TO BUILD A RELIABLE RF MEMS SWITCH
Gabriel M. REBEIZ
Abstract

13

COMBINATION OF 2D AND 3D METHOD OF LINE APPROACH FOR THE ACCURATE LOSS DETERMINATION IN RF MEMS CIRCUITS
Larissa VIETZORRECK
Abstract

19

LOW LOSS PIEZOELECTRIC SPMT RF MEMS SWITCHES
David J. CHUNG, Ronald G. POLCAWICH, Daniel JUDY, Jeffrey PULSKAMP, John PAPAPOLYMEROU
Abstract

27

PAPER-BASED INKJET-PRINTED ANTENNAS AND WIRELESS SENSOR MODULES: THE NEW PARADIGM FOR WEARABLE AND BIOMONITORING ELECTRONICS?
M.M. TENTZERIS, R. VYAS, A. RIDA, L. YANG, A. TRAILLE, C. KRUESI
Abstract

35

CHARGING EFFECT IN RF MEMS SWITCHES WITH DIELECTRIC LESS ACTUATORS
D. MARDIVIRIN, A. POTHIER, A. CRUNTEANU, P. BLONDY
Abstract

45

SIMPLE AND ROBUST AIR GAP-BASED MEMS TECHNOLOGY FOR RF-APPLICATIONS
Phillip EKKELS, Xavier ROTTENBERG, Robert PUERS, Harrie A.C. TILMANS
Abstract

53

INVESTIGATION OF DIELECTRIC CHARGING MECHANISMS IN Al2O3 RF-MEMS CAPACITIVE SWITCHES
E. PAPANDREOU, A. CRUNTEANU, G. PAPAIOANNOU, P. BLONDY, F. DUMAS-BOUCHIAT, C. CHAMPEAUX, A. CATHERINOT
Abstract

63

CHARGING EFFECTS AND RELATED EQUIVALENT CIRCUITS FOR OHMIC SERIES AND SHUNT CAPACITIVE RF MEMS SWITCHES
George PAPAIOANNU, Romolo MARCELLI, Giancarlo BARTOLUCCI, Simone CATONI, Giorgio De ANGELIS, Andrea LUCIBELLO, Emanuela PROIETTI, Benno MARGESIN, Flavio GIACOMOZZI, François DEBORGIES
Abstract

73

AN EFFICIENT MODELING METHOD FOR SIMULATING TIME-RESPONSE OF RF-MEMS SWITCHES
V. LEUS, D. ELATA
Abstract

81

NANO-ELECTRO-MECHANICAL-SYSTEMS: FROM IDEAS TO REALITY CHECK
Adrian M. IONESCU
Abstract

89

SIMPLE NANOELECTROMECHANICAL SYSTEMS FOR GIGA-APPLICATIONS
Mircea DRAGOMAN, George KONSTANTINIDIS, Dana DRAGOMAN, Dan NECULOIU, Alina CISMARU, Robert PLANA, H. HARNAGEL, A. KOSTOPOULOS, Raluca BUICULESCU
Abstract

97

GaN MEMBRANE SUPPORTED MSM ULTRAVIOLET PHOTODETECTOR
Alexandru MÜLLER, George KONSTANTINIDIS, Mircea DRAGOMAN, Dan NECULOIU, Adrian DINESCU, M. ANDROULIDAKI, M. KAYAMBAKI, A. STAVRINIDIS, Dan VASILACHE, Cristina BUICULESCU, A. KOSTOPOULOS, Dan DASCALU
Abstract

101

SILICON MEMS TUNABLE SUPERCONDUCTING MICROWAVE CIRCUITS
M.J. PREST, Y. WANG, F. HUANG, M.J. LANCASTER
Abstract

109

CAN MICROMACHINING HELP US TO FILL THE ‘TERAHERTZ GAP’?
Andrew J. GALLANT
Abstract

117

IN-PLANE RF MEMS RESONATOR SIMULATION
F. CASSET, C. WELHAM, C. DURAND, E. OLLIER, J.F. CARPENTIER, P. ANCEY, M. AÏD
Abstract

127

A CAPACITIVE SHUNT RF MEMS SWITCH FOR COPLANAR WAVEGUIDE TRANSMISSION LINES
Bengt HOLTER, Karsten HUSBY, Håkon SAGBERG, Geir U. JENSEN, Ulrik HANKE, Shimul CHANDRA SAHA, Trond SÆTHER
Abstract

135

HIGH-ISOLATION SHUNT-SERIES MEMS SWITCH FOR A WIDE FREQUENCY RANGE (6-40GHz)
M. FERNÁNDEZ-BOLAÑOS, P. DAINESI, A. M. IONESCU
Abstract

145

DESIGN AND MANUFACTURING OF A 5-BIT MEMS PHASE SHIFTER AT K-BAND
S. BASTIOLI, F. Di MAGGIO, P. FARINELLI, F. GIACOMOZZI, B. MARGESIN, A. OCERA, I. POMONA, M. RUSSO, R. SORRENTINO
Abstract

155

RECONFIGURABLE THREE-DIMENSIONAL MICROMACHINED DIELECTRIC-LOADED CPW PHASE-SHIFTER
N. SOMJIT, G. STEMME, J. OBERHAMMER
Abstract

163

COMPACT REFLECTION-TYPE RF-MEMS PHASE SHIFTER FOR BEAM-STEERABLE REFLECTARRAYS
Tatyana PURTOVA, Till FEGER, Thomas LISEC, Bernd WAGNER, Hermann SCHUMACHER
Abstract
169
LOW-LOSS DMTL PHASE SHIFTER BASED ON FAST MINIATURE RF MEMS SWITCHED CAPACITORS
B. LACROIX, A. POTHIER, A. CRUNTEANU, P. BLONDY
Abstract
177
A SINGLE-POLE-DOUBLE-THROW SWITCH BASED ON CAPACITIVE-ANCHORED MEMS
David GIRBAU, Marco Antonio LLAMAS, Antonio LÁZARO, Lluís PRADELL, Jaume PRADA, Pierre CALMON, Patrick PONS, Robert PLANA
Abstract
185
SYSTEMS ENGINEERING - A HOLISTIC APPROACH, WHATEVER THE REQUIREMENT?
Ayman EL-FATATRY, Henne van Heeren
Abstract
193
FABRICATION OF AN ON-WAFER PACKAGE FOR RF MEMS SWITCHES
F. BARRIERE, A.CRUNTEANU, A.BESSAUDOU, A. POTHIER, F.COSSET, P. BLONDY
Abstract
199
GLASS CAP PACKAGED HIGH ISOLATING Ka-BAND RF-MEMS SWITCH
A. STEHLE, G. GEORGIEV, V. ZIEGLER, B. SCHOENLINNER, U. PRECHTEL, H. SEIDEL, U. SCHMID
Abstract
205
MILLIMETER-WAVE QUARTER-WAVE PATCH ANTENNA ON BENZOCYCLOBUTENE POLYMER
Seonho SEOK, Nathalie ROLLAND, Paul-Alain ROLLAND

Abstract
213
ACOUSTICAL STRUCTURES BASED ON THE THICKENED EDGE LOAD SOLUTION
Jordi VERDU, Pedro de PACO, Oscar MENENDEZ, Eden CORRALES
Abstract
221
A NOVEL BULK ACOUSTIC WAVE DUPLEXER BASED ON STACKED CRYSTAL FILTERS FOR WCDMA HANDSET APPLICATIONS
Oscar MENENDEZ, Pedro de PACO, Eden CORRALES, Jordi VERDU
Abstract
231
BULK ACOUSTIC WAVE CRF DESIGN
Eden CORRALES, Pedro de PACO, Oscar MENENDEZ, Jordi VERDU
Abstract
239
MODELLING AN FABRICATION OF FBARs BASED ON NITRIDES MICROMACHINED MEMBRANES
Dan NECULOIU, Alexandru MULLER, George KONSTANTINIDIS, C. MOROSANU, Dan VASILACHE, A. KOSTOPOULOS, A. STAVRINIDIS
Abstract
249
DEVELOPMENT OF A LAMB-WAVE SENSOR FOR BIOLOGICAL APPLICATIONS
A.K. PANTAZIS, E. GIZELI, A. ADIKIMENAKIS, A. GEORGAKILAS, A. STAVRINIDIS, G. KONSTANTINIDIS
Abstract
255
35 GHz ANALOG PHASE SHIFTER BASED ON PUSH–PULL TOGGLE MEMS VARACTOR
F. SOLAZZI, P. FARINELLI, B. MARGESIN, R. SORRENTINO
Abstract
265
A Ka-BAND TRUE-DELAY-LINE PHASE SHIFTER USING CAPACITIVE MEMS SWITCHES
Themistoklis PRODROMAKIS, Christos PAPAVASSILIOU, Kostis MICHELAKIS
Abstract
273
ONE SINGLE DMTL-BASED CIRCUIT FOR RF-MEMS IMPEDANCE TUNERS AND PHASE SHIFTERS
Tatyana PURTOVA, Tauno VÄHÄ-HEIKKILÄ, Till FEGER, Thomas LISEC, Joachim JANES, Bernd WAGNER, Hermann SCHUMACHER
Abstract
281
RECONFIGURABLE RF-MEMS BASED IMPEDANCE MATCHING NETWORK FOR A CMOS POWER AMPLIFIER
J. IANNACCI, A. GNUDI, B. MARGESIN, F. GIACOMOZZI, L. LARCHER, R. BRAMA
Abstract
289
NUMERICAL SIMULATION OF A CATHODE MICRO-UNIT WITH SILICON FIELD EMITTER
V.A. FEDIRKO, S.V. POLYAKOV
Abstract
297
DIMENSIONING OF THE STOPPERS USED TO REDUCE THE STICKING EFFECT IN ELECTROSTATIC CAPACITOR SWITCHES
H. ACHKAR, J. RUAN, C. VILLENEUVE, D. PEYROU, F. PENNEC, M. SARTOR, P. PONS, R. PLANA
Abstract
301
STICTION INDUCED BY DIELECTRIC BREAKDOWN ON RF-MEMS SWITCHES
A. TAZZOLI, E. AUTIZI, V. PERETTI, G. MENEGHESSO
Abstract
311
INVESTIGATION OF CHARGING PROCESSES IN DIELECTRICS FOR RF-MEMS CAPACITIVE SWITCHES
E. PAPANDREOU, G. PAPAIOANNOU, F. GIACOMOZZI, M. KOUTSOURELI, B. MARGESIN, S. COLPO
Abstract
321
NANOSCALE INVESTIGATIONS IN DIELECTRICS CHARGING BY ELECTROSTATIC FORCE MICROSCOPY
A. BELARNI, M. LAMHAMDI, P. PONS, L. BOUDOU, J. GUASTAVINO, Y. SEGUI, G. PAPAIOANNOU, M. DILHAN, R. PLANA
Abstract
329
RF MEMS DIELECTRIC CHARGING EFFECT ESTIMATION DUE TO HIGH ENERGY ELECTRONS IRRADIATION
V.G. THEONAS, G.J. PAPAIOANNOU, G. KONSTANTINIDIS
Abstract
335
EFFECT OF ENVIRONMENT HUMIDITY ON THE C-V CHARACTERISTICS OF RF-MEMS CAPACITIVE SWITCH
Zbigniew OLSZEWSKI, Russell DUANE, Conor O’MAHONY
Abstract
345
FABRICATION OF RF MEMS COMPONENTS ON CMOS CIRCUITS
A.G. MUKHERJEE, M.E. KIZIROGLOU, S. VATTI, C. PAPAVASSILIOU, A.S. HOLMES, E.M. YEATMAN
Abstract
353
ON-WAFER METHOD FOR EXPERIMENTAL CHARACTERIZATION OF MEMS MATRIX, USING A TWO-PORT VECTOR NETWORK ANALYZER
S. SIMION, R. MARCELLI, G. BARLOLUCCI, G. SAJIN, F. CRACIUNOIU
Abstract
363
DYNAMICS OF MICROMECHANICAL CAPACITIVE SHUNT SWITCHES
Romolo MARCELLI, Andrea LUCIBELLO, Giorgio De ANGELIS, Emanuela PROIETTI, Daniele COMASTRI
Abstract
371
ELECTROMAGNETIC AND ELECTROMECHANICAL STUDY OF A H-SHAPED MILLIMETER MEMS SHUNT SWITCH
Federico CASINI, Romain CRUNELLE, Michel FRYZIEL, Natalie ROLLAND, Paul Alain ROLLAND, Paola FARINELLI, Roberto SORRENTINO
Abstract
381

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