ABOUT THE BOOK
The present volume “Nanomaterials, nanoparticles, nanodevices” belongs to the “Micro and nano engineering” series, coordinated by acad. Dan Dascalu and edited by the Publishing House of the Romanian Academy. The present volume contains the selected papers presented at the 17th edition of the MEMSWAVE conference organized by IMT Bucharest in July 2016 at its’ headquarters, in Bucharest.
The MEMSWAVE conference (originally a workshop) has been taking place every year since 1999. The event was generated by the FP4 European Project MEMSWAVE – Micromachined Circuits for Microwave and Millimeter Wave Applications (1998 – 2001) coordinated by Alexandru Müller (IMT Bucharest). It was the first IST project coordinated by a team from an Eastern European country. The project was nominated between the ten finalists (from 108 projects), for the Descartes Prize Competition of the EC, in 2002.
The first edition was held in Sinaia (Romania) in 1999, as an within the MEMSWAVE project, but open to the participation from outside the consortium. It was idea of Dan Dascalu (by that time CEO of IMT Bucharest). It was followed by the similar events in Budapest (2000) and in Sinaia again, (2001), when Robert Plana (at LAAS – CNRS Toulouse at that time) proposed to transform it in an itinerant European event. In 2016, after 15 years MEMSWAVE have returned to Romania with its 17th edition.
The main papers of the 2001 Sinaia edition have been published in a special volume of the series Micro and Nanoengineering namely Micromachined Microwave Devices and Circuits The Publishing House of the Romanian Academy.
The present volume contains the selected papers presented at the 17th edition of the MEMSWAVE conference organized by IMT Bucharest in July 2016 at its’ headquarters, in Bucharest.
This volume containes original papers presenting recent collaborative research in novel technologies for microwave and millimeter wave devices and circuits, research performed in universities, companies and research centers. The authors are from IMT Bucharest, LAAS Toulouse, FORTH Heraklion, FBK-irst Trento, RF Microtech, Athens University, IHP Frauenhofer Inst., Rohde & Schwarz GmbH, Silicon Radar GmbH, Institute of Electron Devices and Circuits, Ulm University, KTH Royal Institute of Technology, Stockholm, Sensor Systems Department, Acreo Swedish ICT.
The volume addresses a wide RF MEMS topic. Some papers present MEMS membrane composite membrane layer system for MEMS varactor, flexible Kapton technology for V-band applications, the electrical properties of silicon nitride dielectric films with embedded Multi-Walled Carbon Nanotubes, that can be used in RF MEMS capacitive switches, the manufacturing and testing of a new type of compact and low loss 4th order Ka-band filter in multilayer micromachining technology.
One paper presents first ever RF MEMS switch reported to be operating above 220 GHz. It is a 500-750 GHz waveguide based Single-Pole Single-Throw (SPST) switch achieving a 40% bandwidth. Other papers address the analysis of pull-up capacitance-voltage characteristic of MEMS capacitive switches by introducing an analytical model that takes into account the case of a real device, where the charge is not uniformly distributed at the surface of the dielectric film and the switch armatures are not parallel and on-chip high-voltage charge pump integrated in a 0.13 µm SiGe:BiCMOS technology intended to be used for the actuation of BiCMOS embedded RF-MEMS devices like switches and varactors.